India, Aug. 20 -- On August 13, China's first domestically developed commercial electron beam lithography machine, Xizhi, was officially unveiled in Yuhang, Zhejiang.
According to Hangzhou Government Website, this machine is one of the first projects signed at Zhejiang University's Technology Commercialization Base. It has already been tested at a client site, with precision on par with mainstream international equipment. This milestone marks that quantum chip R&D now has its own "Chinese engraving knife."
A member of the R&D team explained that Xizhi is dedicated to the core stages of quantum chip and next-generation semiconductor research. It uses a high-energy electron beam to "handwrite" circuits on silicon substrates, achieving a p...
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