RWTH Aachen University (KoR)Lehrstuhls fur Technologie Optischer Systeme (TOS) secures contract for Research and Experimental Development Services-»Study for the development of high-resolution optical measuring systems for a comparable facet mirror under EUV radiation (Lab-Mems)

Posted On: 2025-08-21

Germany, Aug. 21 -- Germany based RWTH Aachen University (KoR)Lehrstuhls fur Technologie Optischer Systeme (TOS) has secured contract from RWTH Aachen University (KoR)Lehrstuhls fur Technologie Optischer Systeme (TOS) for Research and Experimental Development Services-»Study for the development of high-resolution optical measuring systems for a comparable facet mirror under EUV radiation (Lab-Mems). The value of the contract is not disclosed.

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RWTH Aachen University (KoR)Lehrstuhls fur Technologie Optischer Systeme (TOS) secures contract for Research and Experimental Development Services-»Study for the development of high-resolution optical measuring systems for a comparable facet mirror under EUV radiation (Lab-Mems)