ALEXANDRIA, Va., Jan. 20 -- United States Patent no. 12,532,697, issued on Jan. 20, was assigned to ZEUS Co. LTD. (Hwaseong-si, South Korea).
"Etching device and etching method thereof" was invented by Seung Hoon Lee (Hwaseong-si, South Korea), Sung Won Mo (Hwaseong-si, South Korea), Yang Ho Lee (Osan-si, South Korea), Jeong Hyun Bae (Hwaseong-si, South Korea), Seong Hwan Park (Cheongju-si, South Korea) and Hyun Dong Cho (Sejong-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention relates to an etching device and an etching method thereof, the etching device comprising: an etchant supply unit for supplying an etchant to an etching chamber; a rinsing liquid supply unit for supp...