US Patent Issued to YINGUAN SEMICONDUCTOR TECHNOLOGY on June 10 for "Motion device with magnetic levitation for wafer loading and unloading" (Chinese Inventor)

ALEXANDRIA, Va., June 18 -- United States Patent no. 12,327,752, issued on June 10, was assigned to YINGUAN SEMICONDUCTOR TECHNOLOGY Co. LTD. (Shanghai).

"Motion device with magnetic levitation for wafer loading and unloading" was invented by Huoliang Wu (Shanghai).

According to the abstract* released by the U.S. Patent & Trademark Office: "A motion device includes a tray; a rotary stage located below the tray, with an annular upper cavity provided on the upper surface thereof, and with a lower cavity provided on the lower surface thereof. Projections of the annular upper cavity and the lower cavity in the projection direction perpendicular to the upper surface of the rotary stage do not overlap. The device also includes a rotary motor ac...