ALEXANDRIA, Va., June 19 -- United States Patent no. 12,330,228, issued on June 17, was assigned to YIELD ENGINEERING SYSTEMS INC. (Fremont, Calif.).
"Method of using processing oven" was invented by Lei Jing (Santa Clara, Calif.), M Ziaul Karim (San Jose, Calif.), Kenneth Sautter (Sunnyvale, Calif.) and Kang Song (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method of using a processing oven may include disposing at least one substrate in a chamber of the oven and activating a lamp assembly disposed above them to increase their temperature to a first temperature. A chemical vapor may be admitted into the chamber above the at least one substrate and an inert gas may be admitted into the ...