US Patent Issued to YANGTZE MEMORY TECHNOLOGIES on Nov. 4 for "Systems and methods for semiconductor chip surface topography metrology" (Chinese Inventors)

ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,460,920, issued on Nov. 4, was assigned to YANGTZE MEMORY TECHNOLOGIES Co. LTD. (Wuhan, China).

"Systems and methods for semiconductor chip surface topography metrology" was invented by Sicong Wang (Wuhan, China) and Xiaoye Ding (Wuhan, China).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and methods for measuring a surface topography of a semiconductor chip are disclosed. A disclosed system comprises a light source configured to provide low coherent light to a first beam splitter, a scanner configured to use the low coherent light reflected from the first beam splitter to scan positions on a surface of a semiconductor chip, a second beam splitte...