ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,494,386, issued on Dec. 9, was assigned to Yamaha Robotics Co. Ltd. (Tokyo).
"Electronic component cleaning apparatus" was invented by Hiroshi Kikuchi (Tokyo) and Kinn Ri (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "An electronic component cleaning apparatus for cleaning a surface of a wafer includes: a wet cleaning unit, a dry cleaning unit, a transport unit and a control unit. The control unit; performs the wet cleaning of the surface of the wafer by the wet cleaning unit; transports the wafer that has been cleaned to the dry cleaning unit; performs the dry cleaning of the surface of the wafer with atmospheric pressure plasma by the dry cleani...