US Patent Issued to WONIK IPS on March 4 for "Gas supply block and substrate-processing apparatus including the same" (South Korean Inventor)

ALEXANDRIA, Va., March 5 -- United States Patent no. 12,243,720, issued on March 4, was assigned to WONIK IPS Co. LTD (Pyeongtaek-si, South Korea).

"Gas supply block and substrate-processing apparatus including the same" was invented by Byoung Ho Song (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A gas supply block may include a first block, a second block and a third block. The first block may include a first gas inlet passage configured to supply a first process gas. The second block may include a second gas inlet passage configured to supply a second process gas. The third block may be combined with the first block and the second block. The third block may be configured to diffuse ...