ALEXANDRIA, Va., Aug. 6 -- United States Patent no. 12,377,483, issued on Aug. 5, was assigned to WONIK IPS Co. LTD. (Pyeongtaek-si, South Korea).
"Method of assembling substrate supporting apparatus" was invented by Kyu Tae Cho (Pyeongtaek-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed herein is a method of assembling a substrate supporting apparatus, including coupling a conductive rod to an electrode installed in a substrate support provided to support a substrate, forming a sacrificial layer on the rod, bonding the rod and the electrode by melting and infiltrating a filler into a coupling area between the rod and the electrode, while forming a protective layer between the rod an...