ALEXANDRIA, Va., Aug. 26 -- United States Patent no. 12,402,380, issued on Aug. 26, was assigned to Wolfspeed Inc. (Durham, N.C.).
"Nondestructive characterization for crystalline wafers" was invented by Robert Tyler Leonard (Raleigh, N.C.), Matthew David Conrad (Durham, N.C.) and Edward Robert Van Brunt (Raleigh, N.C.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method of analyzing semiconductor wafers includes capturing a first image of a first crystalline material, etching a first surface of the first crystalline material to delineate etch defects in the first crystalline material, and capturing a second image of first crystalline material after etching the first surface of the first crystalline mater...