US Patent Issued to Winbond Electronics on Aug. 19 for "Method and system for monitoring and controlling semiconductor process" (Taiwanese Inventors)

ALEXANDRIA, Va., Aug. 20 -- United States Patent no. 12,394,675, issued on Aug. 19, was assigned to Winbond Electronics Corp. (Taichung, Taiwan).

"Method and system for monitoring and controlling semiconductor process" was invented by Ying-Chu Yen (Taichung, Taiwan) and Wei-Che Chang (Taichung, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method and system for monitoring and controlling a semiconductor process are provided. The method includes: forming at least one active region on a substrate; forming a first patterned photoresist layer for defining at least two word lines on the active region after forming the active region; detecting and measuring positions and dimensions of the active region a...