ALEXANDRIA, Va., June 10 -- United States Patent no. 12,293,933, issued on May 6, was assigned to VM INC. (Icheon, South Korea).
"Electrostatic chuck with multiple heater zones" was invented by Woo Hyung Choi (Seongnam-si, South Korea) and Sang Woo Lee (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is an electrostatic chuck with multiple heater zones. The electrostatic chuck with multiple heater zones comprises multiple micro heater zones; a switch module having each switching means connected to each micro heater zone; and a switch controlling module for controlling an operation of the switch module, wherein each micro heater zone can be heated individually by a corresponding ...