US Patent Issued to Versum Materials US on June 3 for "High purity ethylenediamine for semiconductor applications" (California Inventors)

ALEXANDRIA, Va., June 4 -- United States Patent no. 12,319,637, issued on June 3, was assigned to Versum Materials US LLC (Tempe, Ariz.).

"High purity ethylenediamine for semiconductor applications" was invented by Hareesh Thridandam (Carlsbad, Calif.), Stuart H. Dimock (Lake Forest, Calif.), Steven Gerard Mayorga (Oceanside, Calif.) and Ronald Martin Pearlstein (San Marcos, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for making the EDA that is suitable for use in thin-film semiconductor processing applications, are disclosed. The EDA is purified to remove water and trace metals. Water levels below about 50 ppm by weight are achieved by passing liquid through 3A type molecular sieve in a p...