US Patent Issued to Veeco Instruments on Aug. 26 for "Automated batch production thin film deposition systems and methods of using the same" (Indian, American Inventors)

ALEXANDRIA, Va., Aug. 26 -- United States Patent no. 12,400,894, issued on Aug. 26, was assigned to Veeco Instruments Inc. (Plainview, N.Y.).

"Automated batch production thin film deposition systems and methods of using the same" was invented by Michael W. Pacier (Leominster, Mass.), Michael J. Sershen (Cambridge, Mass.), Adam F. Bertuch (South Hamilton, Mass.), Laurent Lecordier (Arlington, Mass.), Thousif Ahamad Khan Hosakote Buden (Karnataka, India) and Ramesh Prasad Manchaladore Narahari Rao (Karnataka, India).

According to the abstract* released by the U.S. Patent & Trademark Office: "Fully automated batch production thin film deposition systems configured to deliver uniformity combined with high throughput at a low cost-per-wafer. I...