ALEXANDRIA, Va., Aug. 6 -- United States Patent no. 12,381,108, issued on Aug. 5, was assigned to VAT HOLDING AG (Haag, Switzerland).
"Pin lifting device having a temperature sensor" was invented by Adrian Eschenmoser (Grabs, Switzerland), Michael Dur (Hohenweiler, Austria) and Andreas Hofer (Widnau, Switzerland).
According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is a pin lifting device is designed for moving and positioning a substrate to be processed in a vacuum process chamber. The pin lifting device includes a coupling part having a coupling adapted to receive a support pin designed to contact and support the substrate, and further comprises a drive part having a drive unit adapted to cooperate with...