US Patent Issued to Vanguard International Semiconductor on Jan. 27 for "Micro-electro-mechanical system (MEMs) devices including sidewall stoppers" (Singaporean Inventors)

ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,534,362, issued on Jan. 27, was assigned to Vanguard International Semiconductor Corp. (Hsinchu, Taiwan).

"Micro-electro-mechanical system (MEMs) devices including sidewall stoppers" was invented by Rakesh Chand (Singapore), Sock Kuan Soo (Singapore), Muniandy Shunmugam (Singapore) and Ramachandramurthy Pradeep Yelehanka (Singapore).

According to the abstract* released by the U.S. Patent & Trademark Office: "A micro-electro-mechanical system (MEMS) device includes a supporting substrate, a cavity disposed in the supporting substrate, a stopper, and a MEMS structure. The stopper is disposed between the supporting substrate and the cavity, and an inner sidewall of the stopper is in con...