US Patent Issued to Vactronix Scientific on Oct. 1 for "Inverted cylindrical magnetron (ICM) system and methods of use" (California Inventors)

ALEXANDRIA, Va., Oct. 2 -- United States Patent no. 12,106,924, issued on Oct. 1, was assigned to Vactronix Scientific LLC (San Antonio).

"Inverted cylindrical magnetron (ICM) system and methods of use" was invented by Tianzong Xu (San Ramon, Calif.), George Xinsheng Guo (Palo Alto, Calif.) and Oahn Nguyen (Union City, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An Inverted Cylindrical Magnetron (ICM) System and Methods of Use is disclosed herein generally comprising a co-axial central anode concentrically located within a first annular end anode and a second annular end anode; a process chamber including a top end and a bottom end in which the first annular end anode and the second annular end ano...