ALEXANDRIA, Va., March 12 -- United States Patent no. 12,250,762, issued on March 11, was assigned to Ushio Denki K.K. (Tokyo).
"Light source apparatus" was invented by Yusuke Teramoto (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A light source apparatus, in which an energy beam transforms a liquid raw material into plasma to extract radiation, includes a rotation body, a raw material supply section, and a layer thickness adjustment section. The rotation body is disposed at a position onto which the energy beam is incident, and includes a groove overlapping with an incident area of the energy beam. The raw material supply section supplies the groove with the liquid raw material. The layer thickness ...