ALEXANDRIA, Va., June 4 -- United States Patent no. 12,321,107, issued on June 3, was assigned to USHIO DENKI K.K. (Japan).
"Extreme ultraviolet light source device and protection method for receiving plate member" was invented by Hironobu Yabuta (Tokyo) and Nobuaki Miyagawa (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "An extreme ultraviolet light source apparatus includes a light source part for generating a plasma that emits extreme ultraviolet light with use of excitation of a raw material for emitting extreme ultraviolet light; a storage vessel for storing a melt of a waste material including the raw material and a melt of particles of debris that are emitted from the plasma; a receiving plate m...