US Patent Issued to UNM RAINFOREST INNOVATIONS on Sept. 16 for "Method and system for in-line optical scatterometry" (New Mexico Inventors)

ALEXANDRIA, Va., Sept. 17 -- United States Patent no. 12,416,580, issued on Sept. 16, was assigned to UNM RAINFOREST INNOVATIONS (Albuquerque, N.M.).

"Method and system for in-line optical scatterometry" was invented by Juan Jose Faria Briceno (Albuquerque, N.M.) and Steven R. J. Brueck (Albuquerque, N.M.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A system for measuring a periodic array of structures on a sample is provided. The system includes an optical source configured to produce an optical beam; an optical system configured to control the polarization of the optical beam and to focus the optical beam with a first NA1 on a sample surface and to sweep the angle of incidence across a range of angles wi...