US Patent Issued to United Semiconductor (Xiamen) on Jan. 27 for "Semiconductor process machine and operation method thereof" (Singaporean, Chinese, Taiwanese Inventors)

ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,538,738, issued on Jan. 27, was assigned to United Semiconductor (Xiamen) Co. Ltd. (Fujian, China).

"Semiconductor process machine and operation method thereof" was invented by Haipeng Zhu (Fujian, China), Xijun Guo (Singapore), Min-Hsien Chen (Taichung, Taiwan), Kuo Liang Huang (Singapore) and Wen Yi Tan (Fujian, China).

According to the abstract* released by the U.S. Patent & Trademark Office: "The invention provides a semiconductor processing machine, which comprises a plurality of chambers, at least one of the chamber is a load-lock chamber, and the load-lock chamber comprises a bottom surface and a top lid opposite to the bottom surface; and a gas pipeline is connected with the ...