ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,443,113, issued on Oct. 14, was assigned to United Microelectronics Corp. (Hsinchu, Taiwan).
"Overlay target" was invented by Yu-Wei Cheng (Kaohsiung, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An overlay target that includes a plurality of working zones and a plurality of line segments. The line segments in each of the working zones have a plurality of widths and are parallel to each other."
The patent was filed on Nov. 3, 2022, under Application No. 17/979,765.
*For further information, including images, charts and tables, please visit: http://patft.uspto.gov/netacgi/nph-Parser?Sect1=PTO2&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool...