US Patent Issued to UNITED MICROELECTRONICS on Oct. 14 for "MEMS device including coil structure with corrugated polymer film" (Taiwanese Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,441,606, issued on Oct. 14, was assigned to UNITED MICROELECTRONICS CORP. (Hsinchu, Taiwan).

"MEMS device including coil structure with corrugated polymer film" was invented by Jung-Hao Chang (Taoyuan, Taiwan) and Weng-Yi Chen (Hsinchu County, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A micro electro mechanical system (MEMS) device and a method for manufacturing the same are provided. The MEMS device includes a substrate, a polymer film on the substrate and having a lower surface facing toward the substrate, a cavity passing through the substrate, and coil structures on the substrate and in the polymer film. The polymer film includes a corru...