US Patent Issued to Toto on June 24 for "Electrostatic chuck including a heater element with mutiple heating zones" (Japanese Inventors)

ALEXANDRIA, Va., June 25 -- United States Patent no. 12,341,049, issued on June 24, was assigned to Toto Ltd. (Fukuoka, Japan).

"Electrostatic chuck including a heater element with mutiple heating zones" was invented by Akihito Ono (Kitakyushu, Japan) and Jumpei Uefuji (Kitakyushu, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An electrostatic chuck includes a ceramic dielectric substrate, a base plate, and a heater unit. The heater unit includes first and second heater elements. The first heater element includes a first zone. The first heater element includes first and second protruding portions. The first zone includes a first facing region in which the first protruding portion and the second protru...