ALEXANDRIA, Va., July 30 -- United States Patent no. 12,374,574, issued on July 29, was assigned to Toto Ltd. (Fukuoka, Japan).
"Electrostatic chuck" was invented by Akihito Ono (Kitakyushu, Japan), Jumpei Uefuji (Kitakyushu, Japan) and Tatsuya Hayakawa (Kitakyushu, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An electrostatic chuck includes a ceramic dielectric substrate, a base plate, and a heater unit. The heater unit includes a first power feeding portion, a second power feeding portion, and a heater line. The heater line includes a plurality of extension portions arranged in a second direction. The plurality of extension portions includes a first extension portion and a second extension portion....