ALEXANDRIA, Va., Aug. 20 -- United States Patent no. 12,395,101, issued on Aug. 19, was assigned to Toto Ltd. (Fukuoka, Japan).
"Electrostatic chuck" was invented by Tetsuro Itoyama (Kitakyushu, Japan) and Jumpei Uefuji (Kitakyushu, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An electrostatic chuck includes a ceramic dielectric substrate, a base plate, a heater part, and a bypass part. The ceramic dielectric substrate includes a substrate upper surface and a substrate lower surface. The heater part is disposed between the substrate upper surface and the substrate lower surface. The heater part includes at least one heater layer. The heater part includes a heater upper surface and a heater lower surf...