US Patent Issued to TOSOH on Sept. 23 for "Titanium complex, method for producing same, and method for producing titanium-containing thin film" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,421,259, issued on Sept. 23, was assigned to TOSOH Corp. (Yamaguchi, Japan).

"Titanium complex, method for producing same, and method for producing titanium-containing thin film" was invented by Shuya Ikemura (Ayase, Japan), Hiroyuki Oike (Ayase, Japan), Yuki Yamamoto (Ayase, Japan) and Teppei Hayakawa (Ayase, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A titanium complex useful for producing a titanium-containing thin film under low temperature deposition conditions without using an oxidative gas is provided. A titanium complex represented by the general formula (1) (wherein each of R1 and R2 is independently a C1-6 alkyl group which may be b...