ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,449,474, issued on Oct. 21, was assigned to Tokyo Seimitsu Co. Ltd. (Hachioji, Japan).
"Drive control device, drive control method, program and prober" was invented by Eiji Fukano (Hachioji, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A drive control device including an operation instruction transmission unit configured to transmit an operation instruction to a motor driving device for operating a movement mechanism of a wafer chuck; an information acquisition unit (62) configured to acquire a position deviation information including a position deviation at an actual position of the wafer chuck with respect to a position of the wafer chuck in t...