US Patent Issued to TOKYO OHKA KOGYO on Sept. 9 for "Resist composition and method of forming resist pattern" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,411,408, issued on Sept. 9, was assigned to TOKYO OHKA KOGYO Co. LTD. (Kawasaki, Japan).

"Resist composition and method of forming resist pattern" was invented by Masahito Yahagi (Kawasaki, Japan), Tasuku Matsumiya (Kawasaki, Japan), Yosuke Suzuki (Kawasaki, Japan), Yuta Iwasawa (Kawasaki, Japan), Takahiro Kojima (Kawasaki, Japan) and Koshi Onishi (Kawasaki, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A resist composition containing a resin component (A1) having a constitutional unit (a01) derived from a compound represented by General Formula (a0-1) and containing a compound (D0) represented by General Formula (d0), W01 represents a polymeriz...