US Patent Issued to Tokyo Electron on Sept. 30 for "Temperature correction information calculation device, semiconductor manufacturing apparatus, storage medium, and temperature correction information calculation method" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,431,396, issued on Sept. 30, was assigned to Tokyo Electron Ltd. (Tokyo).

"Temperature correction information calculation device, semiconductor manufacturing apparatus, storage medium, and temperature correction information calculation method" was invented by Tatsuya Watanabe (Yamanashi, Japan) and Yuichi Takenaga (Yamanashi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A temperature correction information calculation device includes a model storage unit that stores a model for generating temperature correction information in which a temperature correction value is associated with a cumulative film thickness on an inner wall of a semiconductor ...