US Patent Issued to Tokyo Electron on Sept. 30 for "Temperature correction information calculating device, semiconductor manufacturing apparatus, recording medium, and temperature correction information calculating method" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,431,373, issued on Sept. 30, was assigned to Tokyo Electron Ltd. (Tokyo).

"Temperature correction information calculating device, semiconductor manufacturing apparatus, recording medium, and temperature correction information calculating method" was invented by Tatsuya Watanabe (Yamanashi, Japan) and Yuichi Takenaga (Yamanashi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A temperature correction information calculating device for use with a semiconductor manufacturing apparatus is provided. The semiconductor manufacturing apparatus is configured to correct a preset temperature in accordance with an accumulated film thickness on an inner wall o...