US Patent Issued to Tokyo Electron on Sept. 30 for "Information processing apparatus, transfer position correction method, and substrate processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,428,242, issued on Sept. 30, was assigned to Tokyo Electron Ltd. (Tokyo).

"Information processing apparatus, transfer position correction method, and substrate processing apparatus" was invented by Tadashi Enomoto (Iwate, Japan), Nao Akashi (Hokkaido, Japan), Youngtai Kang (Yamanashi, Japan) and Keishi Shionaga (Yamanashi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An information processing apparatus for controlling a conveying apparatus to convey a substrate to be processed by a substrate processing apparatus includes a processor that performs operations including controlling the conveying apparatus, according to teaching data, to perform a ...