US Patent Issued to Tokyo Electron on Sept. 30 for "Information acquisition system and information acquisition method" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,431,374, issued on Sept. 30, was assigned to Tokyo Electron Ltd. (Tokyo).

"Information acquisition system and information acquisition method" was invented by Junnosuke Maki (Koshi, Japan), Koudai Higashi (Koshi, Japan) and Ryo Konishi (Koshi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An information acquisition system configured to acquire information upon a substrate processing apparatus configured to process a substrate held by a substrate holder includes a base body, instead of the substrate, held by the substrate holder; and multiple position sensors provided at the base body such that detection directions thereof are different from each ...