ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,424,461, issued on Sept. 23, was assigned to Tokyo Electron Ltd. (Tokyo).
"Separating system and separating method" was invented by Satoshi Nishimura (Kumamoto, Japan), Takeshi Tamura (Kumamoto, Japan), Takashi Koga (Kumamoto, Japan) and Yohei Maeda (Kumamoto, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A separating system includes a placing unit, a removing apparatus and a transfer device. The placing unit is configured to place therein a first cassette allowed to accommodate a combined substrate in which a first substrate and a second substrate are bonded to each other with a separation layer therebetween, a second cassette allowed to accomm...