US Patent Issued to Tokyo Electron on Sept. 23 for "Information processing system, temperature control method, and heat treatment apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,424,462, issued on Sept. 23, was assigned to Tokyo Electron Ltd. (Tokyo).

"Information processing system, temperature control method, and heat treatment apparatus" was invented by Hiroyuki Karasawa (Yamanashi, Japan), Masakazu Yamamoto (Iwate, Japan) and Tadashi Enomoto (Iwate, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An information processing system includes a temperature measuring unit configured to measure a temperature distribution, in an array direction of substrates to be treated, at positions between a heater and the substrates in a treatment chamber, a memory, and a processor coupled to the memory and configured to perform a simulat...