US Patent Issued to Tokyo Electron on Oct. 7 for "Semiconductor manufacturing apparatus and processing method of semiconductor manufacturing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,438,021, issued on Oct. 7, was assigned to Tokyo Electron Ltd. (Tokyo).

"Semiconductor manufacturing apparatus and processing method of semiconductor manufacturing apparatus" was invented by Hiromichi Fujii (Hokkaido, Japan) and Takashi Kunieda (Hokkaido, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor manufacturing apparatus includes: an execution instruction receiving unit that receives an execution instruction for the semiconductor manufacturing apparatus to execute a predetermined process related to an operation control of the semiconductor manufacturing apparatus; an identification information receiving unit that receives an inp...