US Patent Issued to Tokyo Electron on Oct. 7 for "LED chuck" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,436,188, issued on Oct. 7, was assigned to Tokyo Electron Ltd. (Tokyo).

"LED chuck" was invented by Tomoki Nukanobu (Nirasaki, Japan), Hiroyuki Nakayama (Nirasaki, Japan), Shigeru Kasai (Nirasaki, Japan), Yoshiyuki Morifuji (Nirasaki, Japan) and Dai Kobayashi (Nirasaki, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided an LED chuck comprising: a top plate on which an object to be inspected is mounted; an LED array substrate disposed to face the object to be inspected, and provided with a plurality of LEDs for heating the object to be inspected that is mounted on the top plate; a cooling plate disposed on a back side of the LED array ...