US Patent Issued to Tokyo Electron on Oct. 7 for "Contactless capacitive measurement tool with improved throughput and accuracy" (New York, Texas Inventors)

ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,435,964, issued on Oct. 7, was assigned to Tokyo Electron Ltd. (Tokyo).

"Contactless capacitive measurement tool with improved throughput and accuracy" was invented by Daniel Fulford (Albany, N.Y.), Mark I. Gardner (Austin, Texas) and Henry Jim Fulford (Albany, N.Y.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and methods are provided herein for determining the planarity of a semiconductor wafer. The systems and methods described herein utilize a capacitive measurement tool to detect and characterize the bow of a semiconductor wafer. The capacitive measurement tool disclosed herein utilizes a non-contact, capacitive sensor unit to measure wafer...