US Patent Issued to Tokyo Electron on Oct. 7 for "Abnormality detection method and processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,438,055, issued on Oct. 7, was assigned to Tokyo Electron Ltd. (Tokyo).

"Abnormality detection method and processing apparatus" was invented by Shingo Hishiya (Yamanashi, Japan), Nobutoshi Terasawa (Sapporo, Japan), Fumiaki Nagai (Sapporo, Japan), Kazuaki Sasaki (Sapporo, Japan), Hiroaki Kikuchi (Oshu, Japan), Masayuki Kitamura (Yamanashi, Japan), Kazuo Yabe (Yamanashi, Japan), Motoshi Fukudome (Yamanashi, Japan), Tatsuya Miyahara (Yamanashi, Japan), Eiji Kikama (Yamanashi, Japan), Yuki Tanabe (Yamanashi, Japan) and Tomoyuki Nagata (Oshu, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An abnormality detection method includes: supplying a gas contro...