US Patent Issued to Tokyo Electron on Oct. 21 for "Processing liquid supply system and operation method thereof" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,451,369, issued on Oct. 21, was assigned to Tokyo Electron Ltd. (Tokyo).

"Processing liquid supply system and operation method thereof" was invented by Masatoshi Kasahara (Kumamoto, Japan), Keiichiro Uchino (Kumamoto, Japan), Sadamichi Mori (Kumamoto, Japan) and Naohiro Iwanaga (Kumamoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A processing liquid supply system includes a tank that stores a processing liquid supplied from a processing liquid supply, a circulation passage that is connected to the tank, a plurality of supply passages that is connected to the circulation passage and supplies the processing liquid to each of a plurality of liqu...