US Patent Issued to Tokyo Electron on Oct. 14 for "Apparatus for transporting substrate, system for processing substrate, and method of transporting substrate" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,440,971, issued on Oct. 14, was assigned to Tokyo Electron Ltd. (Tokyo).

"Apparatus for transporting substrate, system for processing substrate, and method of transporting substrate" was invented by Takehiro Shindo (Yamanashi, Japan), Akira Takahashi (Iwate, Japan), Takashi Horiuchi (Yamanashi, Japan) and Toshiaki Kodama (Yamanashi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided an apparatus for transporting a substrate. The apparatus comprises: an end effector including a fork which holds the substrate and a wrist part which holds a proximal end portion of the fork; an arm provided with the end effector installed thereon and a m...