US Patent Issued to Tokyo Electron on Nov. 4 for "Separating apparatus and separating method" (Japanese Inventors)

ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,459,007, issued on Nov. 4, was assigned to Tokyo Electron Ltd. (Tokyo).

"Separating apparatus and separating method" was invented by Yohei Yamawaki (Kumamoto, Japan), Seiji Nakano (Kumamoto, Japan) and Yoshihiro Kawaguchi (Kumamoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A separating apparatus configured to separate a processing target object into a first separation body and a second separation body includes a first holder configured to hold the first separation body; a second holder configured to hold the second separation body; a moving unit configured to move the first holder and the second holder relatively to each other; and a separati...