ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,463,022, issued on Nov. 4, was assigned to Tokyo Electron Ltd. (Tokyo).
"Placing table and substrate processing apparatus" was invented by Yusuke Kikuchi (Yamanashi, Japan) and Masato Shinada (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "There is a placing table comprising: an electrostatic chuck having a chuck electrode, wherein the electrostatic chuck is configured to attract and hold a substrate on a placing surface and to be rotatable; a freezing device having a contact surface in contact with or separated from a surface of the electrostatic chuck opposite to the placing surface and configured to cool the electrostatic chuck; and a power cont...