US Patent Issued to Tokyo Electron on Nov. 4 for "Device inspection apparatus and device inspection method" (Japanese Inventor)

ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,461,131, issued on Nov. 4, was assigned to Tokyo Electron Ltd. (Tokyo).

"Device inspection apparatus and device inspection method" was invented by Shinya Kurebayashi (Yamanashi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A device inspection apparatus includes a voltage source that applies a voltage to a device to be inspected, a plurality of resistors connected in series between the voltage source and the device, a detector that detects a potential difference across both ends of a resistor group that includes one or more resistors among the plurality of resistors, a switching device that switches the resistor group from which the detector detec...