US Patent Issued to Tokyo Electron on Nov. 25 for "Virtual metrology apparatus, virtual metrology method, and virtual metrology program" (Japanese Inventor)

ALEXANDRIA, Va., Nov. 25 -- United States Patent no. 12,480,756, issued on Nov. 25, was assigned to Tokyo Electron Ltd. (Tokyo).

"Virtual metrology apparatus, virtual metrology method, and virtual metrology program" was invented by Takuro Tsutsui (Hokkaido, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A virtual metrology apparatus, a virtual metrology method, and a virtual metrology program that allow a highly accurate virtual metrology process to be performed is provided. A virtual metrology apparatus includes an acquisition unit configured to acquire a time series data group measured in association with processing of a target object in a predetermined processing unit of a manufacturing process, and...