ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,476,121, issued on Nov. 18, was assigned to Tokyo Electron Ltd. (Tokyo).
"Transfer apparatus" was invented by Masahiro Dogome (Miyagi, Japan) and Masatomo Kita (Miyagi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A transfer apparatus includes a first vacuum transfer module; a first transfer robot disposed in the first vacuum transfer module and at least one ring. In addition, a second vacuum transfer module is provided; and a second transfer robot is disposed in the second vacuum transfer module. A tubular connecting module is disposed between the first vacuum transfer module and the second vacuum transfer module. Further, the first vacuum tran...