US Patent Issued to Tokyo Electron on Nov. 11 for "Method of teaching transfer device, and transfer system" (Japanese Inventor)

ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,466,666, issued on Nov. 11, was assigned to Tokyo Electron Ltd. (Tokyo).

"Method of teaching transfer device, and transfer system" was invented by Takashi Sugimoto (Yamanashi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of teaching a transfer device provided with a pick configured to hold a substrate and a mapping sensor, includes: detecting, in a reference accommodation container in which reference substrates are accommodated, height positions of the reference substrates using the mapping sensor and setting a reference position in a height direction; detecting, in a plurality of accommodation containers in which production substrates ...