ALEXANDRIA, Va., June 17 -- United States Patent no. 12,315,701, issued on May 27, was assigned to Tokyo Electron Ltd. (Tokyo).
"Film forming apparatus" was invented by Yasuhiko Kojima (Yamanashi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A film forming apparatus comprises a processing chamber connected to a ground potential, a holder configured to hold a target, a DC power supply configured to apply a DC voltage to the holder and an anti-adhesion shield disposed to surround the target and supported by the processing chamber through an insulating member. An impedance matcher is connected to the anti-adhesion shield and an RF power supply is connected to the impedance matcher."
The patent was file...