ALEXANDRIA, Va., June 16 -- United States Patent no. 12,306,029, issued on May 20, was assigned to Tokyo Electron Ltd. (Tokyo).
"Aggregation method and processing apparatus" was invented by Takashi Asakawa (Iwate, Japan), Satoshi Tanaka (Yamanashi, Japan) and Ryota Aoi (Hokkaido, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An aggregation method includes: acquiring log information including a measurement value of a force used by a processing apparatus and a measurement date and time, the measurement value being measured by a sensor of the processing apparatus that processes a substrate; storing the measurement value of the force and the measurement date and time included in the acquired log informati...