ALEXANDRIA, Va., June 12 -- United States Patent no. 12,300,495, issued on May 13, was assigned to Tokyo Electron Ltd. (Tokyo).
"Processing apparatus and processing method" was invented by Hayato Tanoue (Kumamoto, Japan) and Yohei Yamashita (Kumamoto, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A processing apparatus configured to process a processing target object includes a modifying device configured to radiate laser light to an inside of the processing target object to form multiple modification layers along a plane direction of the processing target object; and a controller configured to control an operation of the modifying device at least. The controller controls the modifying device to form:...